Our offer
Background:
Ultra-Pure Water has been used for rinsing purposes in microchip manufacturing for decades. To meet the water quality requirements for more and more advanced chip manufacturing, advanced filtering techniques have been developed over the years. However, as of today, the best available ultra-filtration technology is not sufficient with substandard chips and reduced production yield as a result.
Our solution:
Due to the nature of our membrane distillation technique, water is not filtered but rather dissolved through a membrane and condensed on the other side. This enables the formation of our water at a quality which surpasses the current state of the art filters. We call this AngstromPure® water (APW®).
Our offering:
We offer customers and tool providers an option to include our Yield Enhancement Tool (YET) for production of APW® in conjunction with key process steps. Introducing APW® as a part of the rinsing process will increase the yield for these processes, and is an enabler for other applications.
With expertise rooted in cutting-edge research and decades of industry experience, we have the necessary toolbox to support every stage of the wafer rinsing process as well as tool contamination control. Our proprietary water technology combined with deep knowledge in advanced surface analysis help clients minimize contamination risks, improve rinse uniformity, and maintain consistent process control in high-stakes fabrication environments.